Testing Temperature Uniformity Across a Wafer Heater Surface

https://engineered-heat-solutions.stonefielddigest.com/posts/wafer-heater-basics-understanding-thermal-control-in-semiconductor-processing

In wafer heating chucks, a wafer heater must deliver heat in a controlled way. It uses a controlled heating assembly designed to warm a wafer support or chuck. One useful trait is multi-zone control. Still, sensor offset can change the result