Semiconductor Heater Prototyping: What to Review Before Finalizing the Design
https://industrial-thermal-lab.novacrestiq.com/posts/how-to-calculate-heating-requirements-for-a-polyimide-heater
In etch equipment, a semiconductor heater must deliver heat in a controlled way. It uses a resistive heating element integrated with an electrically insulating structure. One useful trait is repeatable heat delivery